Dry Pump A Series

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basic information

FaiFaa Vacuum Company is headquartered in Aslar, Germany, and has been developing and manufacturing cutting-edge vacuum equipment, vacuum measurement instruments, and vacuum analysis instruments since 1890. The company developed the world's first turbo pump over 50 years ago. Since then, it has continued to innovate and has established itself as a leading company in this field, providing optimal vacuum environments to customers across various sectors, including semiconductors, analysis, coating, industry, and R&D in countries around the world.

Price range

Delivery Time

※Delivery times may vary depending on the model number and quantity. Please feel free to contact us.

Applications/Examples of results

【Application】 A100L / A200L • Ideal dry pumps for use in transfer chambers for load locks and clean processes. A103P • Suitable for medium processes (etchers, ion implantation, PVD, etc.). ADH Series • Best suited for ALD, epitaxial growth, and EUV processes (can be used with hydrogen and silane-based gases).

Detailed information

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  The vacuum section of the pump does not use lubricating oil, allowing for an oil-free and clean vacuum. Dry pumps are gas transfer type vacuum pumps, with structural differences such as diaphragm, screw, scroll, and Roots types, and we provide the optimal pump suited to your applications. A100L / A200L • Ideal dry pump for use in transfer chambers for load locks and clean processes • Low vibration, high throughput: capable of 300 cycles per hour in a 20L L/L chamber • Achieves low power consumption through the use of a high-efficiency motor • Compact design with a footprint of 0.17m²; can be positioned vertically or horizontally • Can be stacked in two layers (only horizontal with the intake facing) A103P • For medium processes (etching, ion implantation, PVD, etc.) • Energy-saving and space-saving

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  The vacuum section of the pump does not use lubricating oil, allowing for an oil-free and clean vacuum. Dry pumps are gas transfer vacuum pumps with structural differences such as diaphragm, screw, scroll, and Roots types, and we provide the optimal pump suited to your applications. A4 Series • Achieves low power consumption with a multi-Roots structure and high-efficiency motor • Suppresses the accumulation of by-products through heater temperature control • Long pump lifespan due to corrosion-resistant nickel coating (XN model) • Extends the operating time of process equipment with excellent particle exhaust capability • Enhanced monitoring functions allow for better control of pump conditions (cooling water sensors, vibration boxes, etc.) • Prevents clogging in the pump and exhaust piping with hot N2 • Complies with IP33, SEMI S2, and UL standards

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  The vacuum section of the pump does not use lubricating oil, allowing for an oil-free and clean vacuum. Dry pumps are gas transfer type vacuum pumps, with structural differences such as diaphragm, screw, scroll, and Roots types, and we provide the optimal pump suited to your application. ADH Series • High-performance dry pumps for high-end processes • Exhaust performance of H2 gas equivalent to that of N2 gas • Ideal for ALD, epitaxial growth, and EUV processes (can be used with hydrogen and silane-based gases) • Achieves low power consumption through multi-Roots structure, high-efficiency motor, and idling mode • High-power motor reduces large particle discharge and failures during pump restart

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