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  1. Home
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  3. Measurement and Analysis
  4. Other measuring instruments
  5. Flow Meter
  6. Mass Flow Controller/ Meter "SLAMf Series"

Mass Flow Controller/ Meter "SLAMf Series"

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Model SLAMf50/SLAMf51/SLAMf53/SLAMf60/SLAMf61/SLAMf63/SLAMf64

last updated:Aug 08, 2025

ITWジャパン
ITWジャパン
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Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.

    Flow MeterFlow Control
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Mass Flow Controller/ Meter "SLAMf Series"

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  • Related Link - https://www.brooksinstrument.com/ja-jp/products/ma…
  • Special site - Product/service details - https://pr.mono.ipros.com/itwjyapan/product/

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basic information

【Other Features】 ■ Achieves high process accuracy and control even under harsh conditions due to the highly durable device housing. ■ Improves the S/N ratio at low set points with unique thermal sensor technology. ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration. ■ Up to six calibration programs can be accommodated with a single device. ■ Equipped with an easily accessible service port to simplify installation, troubleshooting, and diagnostic tasks. ■ High precision is achieved through high-performance measurement systems and calibration based on global standards. ■ Streamlines integration into existing systems with several types of protocol communication interfaces. *For more details, please refer to the related link page or feel free to contact us.

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【Applications】 ■ Pilot plants for petrochemicals and chemical gases ■ Life science bioreactors ■ Blanketing in food processing *For more details, please refer to the related links page or feel free to contact us.

catalog(6)

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Pressure Controller "SLA/SLAMf Series"

Pressure Controller "SLA/SLAMf Series"

PRODUCT
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Mass flow meter explosion-proof structure electrical machinery equipment type certification approval certificate

Mass flow meter explosion-proof structure electrical machinery equipment type certification approval certificate

OTHER
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Realizing Precision Control in Energy Innovation (Brooks Instrument Solutions Supporting a Sustainable Future)

Realizing Precision Control in Energy Innovation (Brooks Instrument Solutions Supporting a Sustainable Future)

TECHNICAL
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Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

CATALOG
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Service & Support

Service & Support

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Mass Flow Controller Explosion-Proof Structure Electrical Machinery Equipment Type Certification Approval Certificate

Mass Flow Controller Explosion-Proof Structure Electrical Machinery Equipment Type Certification Approval Certificate

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News about this product(6)

Solutions from Brooks Instrument that support a sustainable future.

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Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.

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[Panel Material] Contributing to Scale-Up and Automation

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■ Wide flow range/pressure conditions and support for digital I/O ■ Certificates and certifications ■ Applications Please take a look here. https://www.ipros.jp/catalog/detail/752600 You can also view it from related catalogs.

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<Application Information> Accurate and stable supply of gas and liquid for titanium nitride coating.

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Titanium is frequently used in such applications to form a very hard titanium nitride (TiN) coating on the target products. Titanium coatings are often used for decorative purposes on jewelry, household appliances, and automotive trim due to their golden appearance. Similar coatings may also be used on the surfaces of medical devices and instruments as non-toxic options. This type of coating is now being applied in advanced biomedical devices, including in vivo biosensors. The coating of titanium nitride generally employs the CVD process. In this process, multiple chemicals (TiCl4, N2, H2) are supplied to a furnace and reacted at high temperatures to produce titanium nitride, which is then deposited on the surface as a coating. It is crucial for the integrity, appropriate thickness, and uniformity of the coating to accurately deliver these materials to the furnace.

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Elastomer Seal Thermal Mass Flow Controller/ Meter 'SLAMf Series'

Product Information: Elastomer Seal Thermal Mass Flow Controller/ Meter "SLAMf Series"

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Model SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64 "Durability to withstand harsh environments! Achieving excellent precision with precise mass flow control" Whether indoors or outdoors, in environments with dust or places that handle water, the 'SLAMf series' elastomer seal thermal mass flow controllers/meters provide proven high precision and long-term stability unique to the "SLA5800 family." Applications ■ Pilot plants for petrochemical and chemical gases ■ Life science bioreactors ■ Blanketing in food processing

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ITWジャパン

ITWジャパン

Machine elements and parts

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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.

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The related categories of Flow Meter

  • Measurement and Analysis
  • Other measuring instruments
  • Flow Meter
  • Control and Electrical Equipment
  • Process Control Equipment
  • Flow Control
          

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