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  5. Flow Meter
  6. Mass Flow Controller/ Meter "SLAMf Series"

Mass Flow Controller/ Meter "SLAMf Series"

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Model SLAMf50/SLAMf51/SLAMf53/SLAMf60/SLAMf61/SLAMf63/SLAMf64

last updated:Oct 06, 2025

ITWジャパン
ITWジャパン
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Durability that withstands harsh environments! Precision mass flow control that achieves excellent accuracy.

Dust, humidity, extreme temperatures, moisture, and other harsh conditions—no matter the environment, the 'SLAMf Series' elastomer seal thermal mass flow controllers/meters achieve high precision and long-term stability unique to the proven 'SLA5800 family' of meters and controllers. The specially designed NEMA4X/IP66 rated enclosure protects advanced digital electronic components, enabling stable and accurate measurement and control of gas/fluid mass flow essential for processes. 【Features】 ■ High durability enclosure rated NEMA4X / IP66 ■ Wide range of rated flow - from 0.003 to 2500 slpm ■ Compatible with a wide range of temperature and pressure conditions ■ Achieves excellent accuracy ■ Configurable multi-gas/multi-range functionality *For more details, please refer to the related link page or feel free to contact us.

    Flow MeterFlow Control
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Mass Flow Controller/ Meter "SLAMf Series"

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  • Related Link - https://www.brooksinstrument.com/ja-jp/products/ma…
  • Special site - Product/service details - https://pr.mono.ipros.com/itwjyapan/product/

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【Other Features】 ■ Achieves high process accuracy and control even under harsh conditions due to the highly durable device housing. ■ Improves the S/N ratio at low set points with unique thermal sensor technology. ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration. ■ Up to six calibration programs can be accommodated with a single device. ■ Equipped with an easily accessible service port to simplify installation, troubleshooting, and diagnostic tasks. ■ High precision is achieved through high-performance measurement systems and calibration based on global standards. ■ Streamlines integration into existing systems with several types of protocol communication interfaces. *For more details, please refer to the related link page or feel free to contact us.

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【Applications】 ■ Pilot plants for petrochemicals and chemical gases ■ Life science bioreactors ■ Blanketing in food processing *For more details, please refer to the related links page or feel free to contact us.

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Mass flow meter explosion-proof structure electrical machinery equipment type certification approval certificate

Mass flow meter explosion-proof structure electrical machinery equipment type certification approval certificate

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Pressure Controller "SLA/SLAMf Series"

Pressure Controller "SLA/SLAMf Series"

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Realizing Precision Control in Energy Innovation (Brooks Instrument Solutions Supporting a Sustainable Future)

Realizing Precision Control in Energy Innovation (Brooks Instrument Solutions Supporting a Sustainable Future)

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Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

Comprehensive Catalog Product Guide 'flow-pressure-vapor-guide'

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Service & Support

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Mass Flow Controller Explosion-Proof Structure Electrical Machinery Equipment Type Certification Approval Certificate

Mass Flow Controller Explosion-Proof Structure Electrical Machinery Equipment Type Certification Approval Certificate

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Introduction to the measurement principle video of thermal mass flow.

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When using a thermal mass flow meter, it is very important to understand its measurement principle. Setting high-precision and stable process conditions is not only essential but also very beneficial for troubleshooting and early detection. The sensor consists of a heater (H) placed in the center of the tube and temperature sensors (T1 and T2) positioned equidistantly on either side. The heater is continuously supplied with properly controlled power, generating heat. When there is no flow in the sensor tube, the heat from the heater is evenly transferred to temperature sensors T1 and T2, resulting in both being at the same temperature. However, when there is flow in the direction indicated by the arrows in the diagram, the fluid carries heat away from T1, causing its temperature to drop, while T2 receives heat, resulting in a temperature increase. The resulting temperature difference between T1 and T2 becomes a function of the mass flow rate of the fluid within the sensor tube. This is processed appropriately and output as an electrical signal representing the mass flow rate. (This is an excerpt from the original text.) https://www.youtube.com/watch?v=XKpX3rrt1qc [ITW Japan Co., Ltd. Brooks Instrument]

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[Catalog] Elastomer Seal Specifications Digital Thermal Mass Flow Controller/Mass Flow Meter 'SLA5800 Series' (Revised Edition)

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The SLA5800 series thermal mass flow controllers/meters are widely adopted as standard equipment due to their excellent accuracy, stability, and reliability. This series features a wide range of flow measurement capabilities and is suitable for various temperature and pressure conditions, making it ideal for a broad range of applications including research in the chemical and petrochemical fields, analytical instruments, fuel cells, and life sciences. Contents ■Features and Benefits ■Standard Specifications ■Product Dimensions ■Model Codes ■Approvals, Certifications, and Services ■Service and Support, etc.

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SLAMf Series

Obtained domestic explosion-proof certification. Flow measurement and control equipment 'SLAMf series' that combines high safety and reliability.

  • Product news

In fields such as chemistry, petrochemicals, and pharmaceuticals, there is a demand for measurement and control devices that can operate stably over the long term in explosion-proof environments. The 'SLAMf series' handled by ITW Japan is a thermal mass flow controller/meter that has obtained domestic explosion-proof certification (JPEx). It supports a wide flow range of 0.003 to 20800 slpm, achieving both high precision and long-term zero point stability. It has a wealth of installation records in both domestic and international plants, as well as in manufacturing lines. Models: SLAMf50 / SLAMf51 / SLAMf53 / SLAMf60 / SLAMf61 / SLAMf63 / SLAMf64 Applications: ■ Pilot plants for petrochemicals and chemical gases ■ Life science bioreactors ■ Blanketing in food processing

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Solutions from Brooks Instrument that support a sustainable future.

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Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.

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ITWジャパン

ITWジャパン

Machine elements and parts

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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.

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