For temperature management of various chemical solutions! A direct circulation type temperature control device essential for wet processes.
At Nippon Excel Co., Ltd., we handle the "Chemical Circulator." This product can precisely control the temperature of chemical solutions used in RCA cleaning and wet etching. Due to its seal structure where the rubber O-ring does not come into direct contact with the liquid, there is no need to select sealing materials for each type of chemical solution, such as acidic or alkaline liquids. Additionally, the heat exchange components of the cooling and heating sections use high-purity glass-like carbon, eliminating concerns about contamination from leached metal ions, and there is no need for a surface protective film, preventing any decrease in performance due to peeling. 【Features】 ■ High-precision temperature control of chemical solutions ■ Suitable for temperature control near room temperature and highly precise due to the electronic cooling and heating method ■ Complies with international protection standard IP31 ■ Built-in leak sensor and temperature switch ■ Meets the demand for increased cleanliness associated with high mega-pit construction *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ The heat transfer contact material of the cooling and heating section uses high-purity glassy carbon, eliminating concerns about contamination from leached metal ions. ■ There is no reduction in performance due to peeling, as a surface protective film is not required. ■ The seal structure, where the rubber O-ring does not come into direct contact with the liquid, eliminates the need to select sealing materials for each type of chemical solution, such as acidic or alkaline liquids. *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■Temperature management of chemical solutions used in semiconductor manufacturing wet processes ・RCA cleaning solution ・Etching solution ・Developer solution for lithography processes ■Temperature management of various chemical solutions in other fields ・Plating solutions, various surface treatment solutions, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Since our establishment in 1963, we have contributed to the industrial sector by providing a wide range of services as a trading company specializing in industrial sealing components. In 1968, we became a designated dealer for Nippon Pillar Packing Co., Ltd., a leading comprehensive sealing manufacturer, and since 1981, we have been acting as their agent, supplying high-quality Pillar products such as gland packing, gaskets, mechanical seals, and fluororesin products (fittings, pumps, tubes, valves, etc.) to customers in the industrial machinery and semiconductor sectors.