IPA vapor condensation replacement drying device suitable for the drying of ultra-thin Si device manufacturing.
We propose our IPA vapor drying device, which has been developed with a focus on preventing the occurrence of watermarks on substrate surfaces, a common issue in various semiconductor and electronic device manufacturing processes. Additionally, this device serves as a rational cleaning and drying apparatus that not only dries optical and uneven parts requiring clean drying but also performs a high-purity finishing wash using distilled IPA simultaneously. 【Features】 ■ One of the largest market shares in the world ■ Safe design ■ Watermark-free drying ■ Clean drying ■ Capable of drying a wide range of materials, etc. *For more details, please download the PDF or contact us.
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basic information
【Lineup】 ■ Built-in cleaning device type ■ Standalone type *For more details, please download the PDF or contact us.
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Applications/Examples of results
【Applications】 ■Drying in Si device manufacturing ■Drying in SiC power device manufacturing ■Drying in LED and solar cell manufacturing, etc. ■Cleaning and drying of optical and uneven parts *For more details, please download the PDF or contact us.
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Company information
Our company is composed of three business divisions, manufacturing hard disk burnishing machines with approximately 100% global market share, test handlers for semiconductors, appearance inspection equipment, automation equipment for various industries, top-class share high-efficiency solar cell wafer texturing equipment, various precision cleaning devices, drying equipment, and more. Please feel free to contact us if you have any inquiries.