IPA mist direct replacement drying device utilizing IPA vaporless and Marangoni convection.
We propose the "Watermarkless Drying Device," developed through our many years of experience in the design and manufacturing of IPA vapor drying equipment, along with the know-how we have cultivated through numerous case studies, utilizing IPA vapor-less drying and Marangoni convection for continuous improvement. By directly replacing the IPA after cleaning the Si wafer, we can achieve a surface free of water droplets without exposing it to the atmosphere, allowing for a direct replacement of the Si wafer surface from "pure water to IPA." 【Features】 ■ Watermarkless drying ■ Suppression of particle re-adhesion ■ IPA vapor-less ■ Reduction in IPA consumption ■ Capable of drying a wide range of materials ■ Customized design to meet customer needs *For more details, please download the PDF or contact us.
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basic information
【Lineup】 ■ Built-in cleaning device type ■ Standalone type *For more details, please download the PDF or contact us.
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Applications/Examples of results
【Applications】 ■Drying in Si device manufacturing ■Drying in SiC power device manufacturing ■Drying in LED and solar cell manufacturing, etc. *For more details, please download the PDF or contact us.
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Our company is composed of three business divisions, manufacturing hard disk burnishing machines with approximately 100% global market share, test handlers for semiconductors, appearance inspection equipment, automation equipment for various industries, top-class share high-efficiency solar cell wafer texturing equipment, various precision cleaning devices, drying equipment, and more. Please feel free to contact us if you have any inquiries.