Achieving high-speed response with the laminar flow method (differential pressure type)! A wide range of models available from low flow to high flow.
The "MQ Series" is a high-pressure mass flow meter manufactured by ALICAT that can measure the flow of 98 types of gases, including mixed gases, with a single unit. It provides accurate flow measurement of ±(0.8% Reading + 0.2% F.S.) and quickly responds to flow changes with a fast response time of 10 ms. 【Features】 ■ Maximum operating pressure is 320 PSIA (2.2 MPaA). ■ Pressure resistance is 400 PSIA (2.7 MPaA). ■ Fast response time of 10 ms ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Available flow range from 0.5 SCCM to 5000 SLPM ■ Standard equipped with analog output and RS-232C communication ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.
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【Product Lineup (Excerpt)】 ■M Series (Standard Type) ■MS Series (Corrosive Gas/Refrigerant Gas Compatible) ■MW Series (Low Pressure Loss Type) ■MQ Series (High Pressure Type) ■MB/MBS/MWB Series (Portable Mass Flow Meters) ■PCU Series (Portable Calibration Unit) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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■ High-performance mass flow meter/controller M/MC series ■ Low-pressure loss mass flow meter/controller MW/MCW series ■ Corrosive gas and refrigerant gas compatible mass flow meter/controller MS/MCS series ■ Intrinsically safe explosion-proof mass flow meter/controller IS-Max series ■ Liquid flow meter/controller L/LC/LCR series ■ Vacuum shut-off valve equipped MCV/MCVS series ■ SEMI standard compliant valve built-in type MCE/MCES series ■ Dual valve MCD/MCRD series ■ Pressure gauge/pressure controller P/PC/PC3/PCD/PCR series ■ Intrinsically safe explosion-proof pressure gauge/pressure controller IS-Pro series ■ Thermal mass flow meter compact mass flow controller BASIS series ■ High-precision flow control for bioreactors BIO series ■ Coriolis high-pressure low-flow high-precision flow controller CODA series