Minimize the dead volume inside the valve to the absolute limit! This is a diaphragm valve with extremely good gas exchange characteristics. The lift part (ASSY) is replaceable.
The "ZCD Series" is a diaphragm valve that minimizes the internal volume (dead volume) within the valve to the extreme, enhancing gas replacement characteristics. To prevent vacuum closure of the diaphragm and improve the opening speed, the lift (ASSY) component forcibly lifts the diaphragm. Additionally, the lift (ASSY) component can be replaced on the user side. 【Features】 ■ By minimizing the dead volume from the seat to the main flow path when the valve is closed, it achieves exceptionally good gas replacement characteristics. ■ To prevent vacuum closure of the diaphragm and improve the opening speed, the lift (ASSY) component forcibly lifts the diaphragm. ■ The lift (ASSY) component can be replaced on the user side. #Dead Space *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Product Materials】 ■Body: SUS316L, SUS316LE (double melted material) ■Seat: PCTFE ■Diaphragm: Cobalt alloy *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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KITZ SCT combines a wide range of technologies, including metal processing and welding techniques, a spacious and clean environment, ultra-precision cleaning systems, and uniquely developed ultra-precision polishing technology, to develop, manufacture, and provide sales services for various piping components used in semiconductor manufacturing, from vacuum to high-pressure systems. Additionally, we incorporate strict quality control systems, including ISO standards and high-pressure gas certification, aiming for comprehensive cleanliness through all analyses and evaluations from material analysis to process/final products, always responding to the needs of the times.