This is a butterfly valve compatible with semiconductor grade. It improves sealing performance and does not require excessive clamping force! It can be operated with a small opening and closing torque.
The "BZD" series is a butterfly valve that has been completed by incorporating unique cleaning technology into conventional general-purpose butterfly valves, designed to meet semiconductor grade standards. It is an industrial butterfly valve in a wafer shape made of stainless steel for the body and wetted parts. To minimize particle retention and adhesion, the gas (liquid) contact parts are finished with polishing and treated to be oil-free. It is possible to mount a pneumatic actuator via a bracket and connector. 【Features】 ■ Adopts a double-eccentric structure to ensure high sealing performance ■ Operable with a small opening and closing torque ■ The seat material is durable PTFE ■ Can be operated with minimal force, allowing for compact piping compared to lever-operated types ■ It is possible to mount a pneumatic actuator via a bracket and connector *KITZ SCT offers various proposals for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications (Excerpt)】 ■ Maximum operating pressure: 0.98MPa (G) ■ Operating fluid temperature range: -10 to 80℃ ■ Ambient temperature range: -10 to 60℃ ■ Operating fluid: Inert gas (not suitable for reactive or corrosive gases) ■ Operating durability: 10,000 cycles *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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KITZ SCT combines a wide range of technologies, including metal processing and welding techniques, a spacious and clean environment, ultra-precision cleaning systems, and uniquely developed ultra-precision polishing technology, to develop, manufacture, and provide sales services for various piping components used in semiconductor manufacturing, from vacuum to high-pressure systems. Additionally, we incorporate strict quality control systems, including ISO standards and high-pressure gas certification, aiming for comprehensive cleanliness through all analyses and evaluations from material analysis to process/final products, always responding to the needs of the times.
