Capable of handling high-purity liquid materials for semiconductor manufacturing! A valve with high-performance characteristics of a diaphragm valve!
The "WD" is a diaphragm valve that can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids. While maintaining the basic characteristics of the valve, particle performance, and purge characteristics, it allows for the replacement of the seat (ASSY) component on the user side. Additionally, it has an actuator diameter of φ39.7mm and is compatible with a line pitch of 40mm. 【Features】 ■ Can use high-purity liquid materials such as TEOS, which are used in semiconductors and LCD devices, as fluids ■ Allows for the replacement of the seat (ASSY) component on the user side while maintaining purge characteristics and other features ■ Effective in improving maintenance performance and reducing running costs for sealing valves of material containers ■ The seat (ASSY) replacement tool is common with the "WD4 manual valve series" ■ Compatible with a line pitch of 40mm with an actuator diameter of φ39.7mm *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
【Specifications (Excerpt)】 ■Size: WD4 (1/4") ■Cv Value: Manual Valve 0.3 / Automatic Valve 0.23 ■Gas Contact Volume: 3.2cm3 (Straight Valve, CVC Male, OPEN State) ■Environmental Temperature Range: -10℃ to 60℃ ■Operating Pressure (Automatic Valve): 0.5 to 0.7MPa (G) ■Operational Durability (N2 Sealing Test Company Record): 30,000 cycles *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
KITZ SCT combines a wide range of technologies, including metal processing and welding techniques, a spacious and clean environment, ultra-precision cleaning systems, and uniquely developed ultra-precision polishing technology, to develop, manufacture, and provide sales services for various piping components used in semiconductor manufacturing, from vacuum to high-pressure systems. Additionally, we incorporate strict quality control systems, including ISO standards and high-pressure gas certification, aiming for comprehensive cleanliness through all analyses and evaluations from material analysis to process/final products, always responding to the needs of the times.