The "SBB Series" high-purity gas bellows valve now includes a vacuum KF flange connection type in its lineup!
This product is a bellows valve with a KF flange connection type for vacuum use. Leveraging our features of offering a lineup of various valves for high-purity gases and vacuum applications, we can accommodate a wide range from pressurization to vacuum by integrating technology and know-how. It can be used for gas introduction lines for pressure testing in exhaust systems of atmospheric processes such as CVD in semiconductor manufacturing. 【Features】 ■ KF flange connection type for vacuum use ■ Suitable as a leak valve for exhaust system testing for large chambers ■ Capable of accommodating a wide range from pressurization to vacuum *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications (Excerpt)】 ■Body Size: 10A ■Flange Size: NW16 ■Cv Value: 2.1 ■Operating Pressure Range: VAC to 0.98MPa (G) ■Fluid Temperature Range: -10 to 100℃ ■Ambient Temperature Range: -10 to 60℃ *For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■ For gas introduction lines for pressure testing of exhaust systems in processes such as CVD at atmospheric pressure ■ For reducing leak time in leak valve chambers for large chambers such as OLED FPD *For more details, please refer to the PDF document or feel free to contact us.
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KITZ SCT combines a wide range of technologies, including metal processing and welding techniques, a spacious and clean environment, ultra-precision cleaning systems, and uniquely developed ultra-precision polishing technology, to develop, manufacture, and provide sales services for various piping components used in semiconductor manufacturing, from vacuum to high-pressure systems. Additionally, we incorporate strict quality control systems, including ISO standards and high-pressure gas certification, aiming for comprehensive cleanliness through all analyses and evaluations from material analysis to process/final products, always responding to the needs of the times.