The self-driving nano-probe robot 'miBot' is different from conventional manipulators!
This innovative nano-probing system can control up to eight miBot nano-probers and can be offered with various configurations and options. Customization is possible to meet application-specific requirements and installation conditions for the equipment. The compact and lightweight platform for miBot can accommodate various electron microscopes and can be mounted on sample stages such as SEM or introduced into the sample chamber via a load lock. It also supports high-resolution imaging using semi-in-lens objective lenses, enabling nano-probing tests under high-resolution imaging at low acceleration voltages below 0.5 kV using the new FE-SEM. Additionally, the entire nano-probing system can be tilted using the tilt mechanism of the SEM sample stage. This allows for circuit modifications using FIB and nano-probing to be performed in the same environment, resulting in faster and more accurate failure analysis results. *For more details, please refer to the PDF document or feel free to contact us.*
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basic information
【Specifications】 ■ Nano Prober miBotNANO ■ Degrees of Freedom: 4 types of independent drive for each probe (X, Y, R, Z) ■ Dimensions and Weight ・Main Unit: 20.5×20.5×13.6mm³ ・Arm: 8.3mm (no mounting tools required) ・Weight: 12g ■ Maximum Positioning Resolution Motion Mode ・Coarse (stepping) and Fine (scanning) ・Stepping: 50nm (X, Y), 120nm (Z) ・Scanning: 1.5nm (X, Y), 3.5nm (Z) *For more details, please refer to the PDF document or feel free to contact us.
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Microprobe for optical microscopes
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Our company values human resources and has practiced sound management as the foundation of our customers' trust, leading to our growth. We cherish the connections between people and have decided to continue existing as a company recognized by our customers for our significance. The world is changing, and at a considerable speed. We are considering letting go of our past successes. Following traditional methods will not create any new value. We will focus our efforts on things that others do not or cannot do, investing all our energy and resources into this. Even if we are small, we aim to become a company that earns greater trust and inspires our customers.
