Easy maintenance with only parts replacement! Contributes to cost reduction and management load reduction of the system with dual functionality.
The M-361CP is a combination gauge that integrates a Pirani gauge for measuring atmospheric pressure to medium vacuum and a cold cathode gauge for measuring high to ultra-high vacuum. It can measure a wide pressure range with a single unit, contributing to cost reduction and reduced management burden for the system by serving dual purposes. Additionally, it features easy maintenance with only parts replacement required. 【Features】 ■ Improved measurement stability - The newly developed discharge assist function reduces switching failures between the Pirani and cold cathode, as well as measurement interruptions due to lack of discharge. ■ Achieves excellent atmospheric pressure detection (compared to our products) - The Pirani gauge equipped in this device has improved stability and reproducibility near atmospheric pressure. *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■ Input Voltage: DC +15 to 30V ■ Power Consumption: 2.4W ■ Set Point: 2 Contact Outputs (DC 30V 1A) ■ Input/Output Connector: D-sub 9-pin ■ Maximum Cable Length: Up to 300m (1mm²) ■ Operating Temperature Range: 5 to 55℃ ■ Storage Temperature Range: -20 to 70℃ (non-operating) ■ Sensor Model Name: CP2 ■ Dimensions (mm): 50×50×110 (NW25 joint specification) ■ Flange Shape: NW25, NW40, φ70 ICF *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ Vapor deposition, sputtering, ion implantation, MBE ■ SEM, SIMS, AES, XPS, surface/gas/mass analysis ■ Annealing, melting, soldering, reflow, curing, electron beam welding ■ Accelerators, cyclotrons *For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.
