Highly reproducible and low-cost, with no restrictions on installation direction! A model compatible with hard process equipment.
The Pirani gauge "M-351PG" uses Ni filament to improve corrosion resistance and is compatible with hard process equipment such as RIE and CVD. It offers good reproducibility at a low price, with no restrictions on installation direction. It can be used in various devices, including semiconductor and electronic device manufacturing equipment, as well as food and pharmaceutical manufacturing equipment. 【Features】 - Improved corrosion resistance (such as the use of Ni filament) - Good reproducibility at a low price - Operating range from 5×10^-2 Pa to atmospheric pressure - No restrictions on installation direction *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Lineup】 ■M-351PG-SP/N16 ■M-351PG-SP/N25 ■MP2/N16 ■MP2/N25 *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ Semiconductor and electronic device manufacturing equipment, dry etching equipment, plasma CVD equipment, LD-CVD equipment ■ Food and pharmaceutical manufacturing equipment, vacuum freeze drying, vacuum distillation equipment, sterilization equipment, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.