[Demo unit available for loan] Dedicated power supply for electrostatic chucks
CTPS-3KV2AF and others
This is a dedicated power supply for an electrostatic chuck that can output high DC voltage with both positive and negative polarities.
At Creative Technology Co., Ltd., we offer the introduction of electrostatic chucks, as well as comprehensive proposals and purchases of dedicated power supplies and peripherals. Our "Dedicated Power Supply for Electrostatic Chucks" has been developed to allow for more comfortable and safe use of electrostatic chucks, with the option to select specifications according to your needs. In the event of a chuck system anomaly, the power supply is equipped with a safety feature that automatically turns off the power, preventing accidents before they occur. Additionally, it is designed with a de-chuck assist function and polarity switching function to reduce residual charge when the power is off and maintain stable gripping force. 【Features】 ■ Specification selection according to application ■ Automatic power-off function during anomalies ■ Reduction of residual charge ■ Stable gripping force through polarity switching *For more details, please refer to the PDF materials or feel free to contact us via our website. Website: https://creative-technology.co.jp/products/chuck/
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basic information
【Cases where a dedicated power supply for electrostatic chucks is recommended】 ■ When using an electrostatic chuck for the first time ■ When experiencing issues with residual charge ■ When wanting to use an electrostatic chuck with stable gripping force *For more details, please refer to the PDF document or feel free to contact us.
Price range
P4
Delivery Time
Applications/Examples of results
【Application Examples】 ■ When introducing electrostatic chucks ■ Improvement of de-chucking properties ■ Stability of gripping force *For more details, please refer to the PDF document or feel free to contact us.
Detailed information
Line up（2）
| Model number | overview |
|---|---|
| CTPS-3KV2AF | This is a dedicated power supply for electrostatic chucks compatible with 3Kv. |
| CTPS-2KV2AS | This is a dedicated power supply for electrostatic chucks compatible with 2Kv. |
catalog（2）
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Company information
In 1985, Creative Technology began with the development of processing technology for brittle materials, specifically fine ceramics. In the 1990s, it successfully developed electrostatic chucks for semiconductor manufacturing equipment, based on that processing technology. Furthermore, in the early 2000s, it established a regeneration business for electrostatic chucks, leveraging the development and manufacturing technology it had cultivated, and built connections with customers around the world. Now, we are evolving the technology used in the semiconductor industry into various forms and working on the development of high-value-added electrostatic adhesion application products. Creative Technology contributes to labor-saving and IoT initiatives in various fields through technology that connects objects. If you can provide samples, we also conduct adhesion tests at our company. Please feel free to consult with us.
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