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  6. [Case Study] Chiller Implementation Case Collection - Semiconductor and Electronics Industry Edition / Apiste

[Case Study] Chiller Implementation Case Collection - Semiconductor and Electronics Industry Edition / Apiste

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last updated:Mar 19, 2026

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For cooling of sputter etching equipment and laser oscillators!

This document is an application guide for the semiconductor, electronics, and electrical industries using our high-performance chiller, the "PCU-SL Series." It introduces various applications, including the cooling of sputtering and etching equipment, cooling of laser oscillators, and more, along with illustrations. Please make use of it. [Contents] ■ Cooling of vacuum deposition equipment ■ Cooling of sputtering and etching equipment ■ Temperature conditions for aging test equipment for semiconductor devices ■ Cooling of laser oscillators ■ Temperature control of chemical solution tanks *For more details, please refer to the PDF document or feel free to contact us.

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[Case Study] Chiller Implementation Case Collection - Semiconductor and Electronics Industry Edition / Apiste

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  • Related Link - https://www.apiste.co.jp/pcu/feature/pcu-sl/
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【Other Listings】 ■ Cooling capability that persists even under adverse conditions ■ Overwhelming response and temperature stability that shortens takt time ■ Service & Support ■ PRODUCT LINEUP *For more details, please refer to the PDF document or feel free to contact us.

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Chiller Application Guide for the Semiconductor, Electronics, and Electrical Industries

Chiller Application Guide for the Semiconductor, Electronics, and Electrical Industries

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Chiller PCU Series Comprehensive Catalog

Chiller PCU Series Comprehensive Catalog

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High-Performance Chiller Application Guide for the Semiconductor, Electronics, and Electrical Industry Now Available

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We have published an application guide for the semiconductor, electronics, and electrical industries that leverages the features of our high-performance chiller, the "PCU-SL Series." This document introduces applications for the semiconductor, electronics, and electrical industries using our high-performance chiller, the "PCU-SL Series." We will solve various traditional problems in applications such as cooling for vacuum deposition equipment, sputtering and etching equipment, and laser oscillators with the high-performance chiller "PCU-SL Series"! We have presented the information clearly with illustrations, so if you are interested, please download the PDF from the related catalog below or feel free to contact us. [Contents] ■ Cooling for vacuum deposition equipment ■ Cooling for sputtering and etching equipment ■ Temperature conditions for aging test equipment for semiconductor devices ■ Cooling for laser oscillators ■ Temperature control for chemical solution tanks

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"Apice," which means "peak" in Spanish. That peak represents "technology" = robust development capabilities, "product" = unmatched high quality, "sincerity" = human service. This spirit, depicted in the clear blue sky, has taken shape in reality, becoming distinctly outlined. And, looking further ahead. What lies in our vision is already the blue sky of the future. Aiming for a new peak.

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