It is a sheet resistance measurement system using the four-probe method.
The compactly formed four-point probe system quickly and accurately measures the resistivity and sheet resistance of diverse electronic materials in the research and development, inspection processes, and manufacturing lines of semiconductor/liquid crystal substrates, solar cell cells, and conductive thin films using the four-probe method.
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basic information
It can accommodate various film qualities ranging from thin films to thick films, such as metal layers, epitaxial layers, ion implantation layers, and diffusion layers. Additionally, it offers display functions for averages, V/I, and standard deviations, and allows for data aggregation and 3D mapping using Windows. Furthermore, as an option, it can support extended measurement ranges, SPC (statistical process control functions), temperature compensation functions, and CtoC usage.
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Sheet resistance measurement
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Company information
Yamato Corporation's Measurement Equipment Division manufactures and sells inspection, analysis, and evaluation devices necessary for research and development and production in the semiconductor, organic EL, liquid crystal, solar cell, and fuel cell industries. In particular, we specialize in developing devices used in research and development departments that require measurements under special environmental conditions, and we have numerous achievements in delivering to cutting-edge fields. Additionally, we are currently challenging ourselves to integrate conventional probing technology into applied technology fields, aiming to establish a system that can support inspection, analysis, and evaluation in all areas, including applied technologies centered around semiconductors in the future. 【Head Office and Branch Locations】 ◆ Kobe Head Office 〒650-0047 1-4-6 Minamimachi, Port Island, Chuo Ward, Kobe City TEL (078) 304-5178 (DI) FAX (078) 304-6087 ◆ Tokyo Branch 〒107-0062 1-15-9 Minami Aoyama, Minato Ward, Tokyo TEL (03) 3403-0771 FAX (03) 3403-0813 ◆ Nagoya Branch 〒460-0002 2-19-25 Marunouchi, Naka Ward, Nagoya City YH Marunouchi Building TEL (052) 212-4932 FAX (052) 212-4935