Ideal for flow/back pressure control in semiconductor wet processes! Valve made of all-fluororesin with an electric motor [Compatible with CMP slurry].
This is an electric control valve made of fluororesin equipped with a high-precision stepping motor. It allows for precise control of the valve opening using DC24V (power supply) and 4-20mA (analog signal), enabling flow control and back pressure control. Its smooth flow path makes it suitable for fluids with complex compositions, such as CMP slurries. It also supports small flow control of less than 1 l/min.
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basic information
【Size】1/4" to 1" 【Applicable Fluids】Corrosive and inert gases and liquids 【Fluid Temperature】10 to 150℃ 【Operating Pressure】Max 0.6MPa 【Ambient Temperature】Max 60℃ 【Body Material】PFA, PTFE 【Diaphragm Material】PTFE 【Connection】Flare, Pillar 【Power Supply】24 V DC 【Input Signal】4 – 20 mA / 0 – 10 V 【Operating Speed】Max. 2 mm/s 【Stroke】4 mm (Opening and closing time approximately 2 seconds) 【Standard Flow Range】0~14 l/min *For flow rates below 1 l/min or above 20 l/min, please inquire.
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Applications/Examples of results
【Applications】 ● Flow control for cleaning devices ● Flow control of slurry in CMP equipment ● Back pressure control of the system ● Control of filling amount in filling applications ● Pulsation control of pumps
Detailed information
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Internal structure diagram
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Control case
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Company information
GEMÜ provides value through its cutting-edge manufacturing capabilities and new technology development. We have strong connections with the pharmaceutical industry worldwide and have been engaged in the development and improvement of valves. As a result, we offer a wide range of products, including "sanitary diaphragm valves," which require sterility, and "valves specialized for semiconductor manufacturing," which demand high control precision. We have established six manufacturing sites around the world and provide services in over 50 countries. As a leading company in the sanitary valve market, our products are adopted in many plants. We actively engage in research and development, with over 5% of our annual sales allocated to development investments. Thanks to this effort, we have been recognized by the Institute for Management and Economic Research (IMWF) in Germany as a technology company promoting digitalization.
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