Here is the answer! Introducing solutions and examples for ultra-micro leak testing!
The "WATMASS-MPH DA System" is a new concept gas analysis device that combines the technology of our ultra-low gas emission residual gas analyzer "WATMASS" with the technology of ultra-low gas emission vacuum structural materials (0.2% BeCu alloy). Our ultra-trace gas analysis device "WATMASS-MPH System" is capable of measuring destruction and leak rates (below 10^-15 Pa·m³/s). It is suitable for MEMS, life science devices, and sealing devices such as semiconductors! ★ We also accept various commissioned gas analyses for device evaluation and material evaluation! ★ 【Features】 ■ Ultra-high sensitivity gas analysis device made of 0.2% BeCu alloy ■ Measurement accuracy evaluation obtained from AIST ■ Capable of measuring destruction and leak rates (below 10^-15 Pa·m³/s) ■ Various commissioned gas analyses are also possible *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■MEMS ■Life Science Devices ■Semiconductors ■Electronic Components etc. *For more details, please refer to the PDF document or feel free to contact us.
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.