Introducing various patterning processes using photolithography technology!
We offer pattern processing for small lot prototypes to mass production for ACF, organic EL, various TEG, MEMS, solar cells, etc., using etching technology. We also accept processing of various film substrates such as glass, PC, PET, and PI. Additionally, we can handle substrate and film formation arrangements. We would like to introduce the "various patterning processes" that we perform. We possess various processing technologies, including lamination processing (such as air cell production), photosensitive resin patterning, and ITO heater processing. *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Various Single-Layer Film Fine Patterning】 ■ Processed Thin Films (Film deposition is outsourced): ITO, Cr, AL, Ni, Au, Cu, Mo, Ti, FTO, etc. ■ Processing Size ・MAX: Work 470mm×370mm ・MIN: 20mm×20mm ■ Processing Achievements: L/S (Line/Space) = 3μm/3μm ⇒ 6μm pitch possible (ITO・Cr) ■ Substrates: Soda, non-alkali, quartz, wafers, ceramics, films, etc. 【Various Multi-Layer Film Fine Patterning】 ■ Processed Thin Films ・ITO + Cr, Cr + ITO, Cr + AL, Cr + Au, Ti + Cu, AL + Ti, Ti + Al + Ti Mo + AL + Mo, AL + Mo + IZO, AL + Mo + ITO (low temperature), etc. Also capable of processing double-sided ITO or single-sided ITO + single-sided Cr, as well as stacking with insulating films. ■ Processing Size ・MAX: 400mm×300mm ・MIN: 100mm×100mm *Depends on film composition ■ Alignment Accuracy ・Within ±3μm ■ Processing Configuration ・Layered patterns only ■ Quantity: Can accommodate from 1 piece
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Applications/Examples of results
【Applications】 - Various evaluation TEGs - Standard substrates for device evaluation - MEMS substrates - Substrates for cell culture, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Specifically, we receive requests for patterning processing on substrates for ACF, organic EL, material evaluation, MEMS, solar cells, and equipment evaluation using photolithography and etching technology from various companies, public research institutions, and research and development departments of universities. We specialize in fine pitch patterning of thin metal films, but we can also consider processing methods for thick films depending on the specifications, so please feel free to consult with us. Additionally, we also accept sputtering deposition processing only. We handle processing not only for glass substrates but also for various film substrates such as PC, PET, and PI. We also accept orders for substrate and film arrangement.