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  6. Aluminum nitride ceramic heater

Aluminum nitride ceramic heater

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last updated:Jul 16, 2024

ワッティー
ワッティー
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Rapid heating and rapid cooling! With thermal conductivity close to that of aluminum, it excels in corrosion resistance.

The "Aluminum Nitride Ceramic Heater (Hi watty)" provided by Watty can be used in semiconductor manufacturing equipment. It uses a high-performance heater made in Japan, capable of heating from room temperature to 600°C in just 5 seconds. The available dimensions are 130×130mm or less than Φ130mm, with customization as a standard option. 【Features】 ■ 600°C in 5 seconds with a high-performance heater made in Japan ■ Fast heating and cooling ■ Thermal conductivity close to that of aluminum metal ■ Low thermal expansion ■ High electrical insulation ■ Excellent corrosion resistance *For more details, please refer to the PDF document or feel free to contact us. ▼ Contact Information TEL: Sagamihara Office 042-704-5352 MAIL: info@watty.co.jp

    Aluminum heaterCeramic Heater
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Aluminum nitride ceramic heater

2021-12-09_16h57_08.png
2021-12-09_16h57_08.png
  • Related Link - https://watty.co.jp/aluminum-nitride/

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basic information

【Specifications】 ■ Maximum operating temperature: 600℃ ■ Heating element: Tungsten ■ Thermal conductivity: 180W/m・K or higher ■ Coefficient of thermal expansion: 4.6×10^-6/℃ ■ Volume resistivity: 10^13Ω・cm or higher ■ Usable dimensions: 130×130mm or Φ130mm or less *For more details, please refer to the PDF document or feel free to contact us.

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【Usage】 ■ Semiconductor manufacturing equipment *For more details, please refer to the PDF document or feel free to contact us.

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ワッティー

ワッティー

Industrial Electrical Equipment

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Our company (formerly known as Keihin Sokkiki Co., Ltd.) was reborn as Watty, Inc. on January 1, 2007, marking our 40th anniversary. The company name combines "watt," a familiar unit of power associated with our main manufacturing division, the Thermal Systems Division (which develops, manufactures, and sells heater units used primarily in semiconductor and FPD manufacturing equipment and various precision instruments), and "water," representing the liquid typically sensed by our other main division, the Sensor Division (which focuses on the development, manufacturing, and sales of liquid level sensors). Thus, we chose the name Watty to reflect these two pillars.

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