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  6. Vacuum pump "Ion pump - Noble pump"

Vacuum pump "Ion pump - Noble pump"

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last updated:Jan 24, 2023

キヤノンアネルバ 栗木本社
キヤノンアネルバ 栗木本社
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No vibration, no noise! You can use it safely for unmanned driving at night without worrying about contaminating the exhaust system!

The "Ion Pump - Noble Pump" is an ultra-high vacuum pump. By generating cold cathode discharge in a magnetic field, ionized gas molecules are embedded in the cathode, and during collisions with the cathode material (Ti), sputtering occurs, continuously creating an active getter film for evacuation. Since it does not use any oils or organic materials, it achieves a clean vacuum without contaminating the system. 【Features】 ■ Completely oil-free ■ Ultra-high vacuum, extreme ultra-high vacuum ■ Unmanned operation ■ Exhaust of inert gases (Noble Pump) *For more details, please refer to the PDF document or feel free to contact us.

    Vacuum pump
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Vacuum pump "Ion pump - Noble pump"

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  • Related Link - https://anelva.canon/business/component/pu_detail0…
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【Other Features】 ■ Since no organic substances such as oil are used, a clean vacuum can be obtained without contaminating the system. ■ Operates in a pressure range of 10^-1Pa to 10^-9Pa, suitable for creating ultra-high vacuum. ■ Only power is required for operation, making it convenient for unmanned operation at night and remote control. ■ Compared to bipolar ion pumps, the exhaust speed for inert gases is increased (approximately 21% of air with argon). *For more details, please refer to the PDF document or feel free to contact us.

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【Applications】 ■ Ultra-high vacuum and extreme high vacuum exhaust systems that are completely oil-free ■ Electron microscopes, surface analysis equipment ■ Particle accelerators, nuclear fusion experimental devices, space environment testing equipment ■ Vacuum holding pumps such as electron tubes *For more details, please refer to the PDF document or feel free to contact us.

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Vacuum pump "Ion pump - Noble pump"

Vacuum pump "Ion pump - Noble pump"

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キヤノンアネルバ

キヤノンアネルバ 栗木本社

Machine elements and parts

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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.

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