40% size reduction! Achieves high efficiency with built-in baking heater and moisture retention cover.
The "Excel Pump" is a compact and lightweight vacuum pump. Based on an ion pump, it has been developed by improving the discharge characteristics in low-pressure regions, featuring pump elements and a built-in heater that enables efficient baking. Additionally, the incorporation of a NEG (non-evaporable getter) pump allows for the achievement of XHV. 【Features】 ■ High exhaust capacity in UHV and XHV regions ■ Realization of high-efficiency baking ■ Compact and lightweight ■ Compatible with clean rooms *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
【Other Features】 - Improved discharge in low pressure regions with a newly developed pump element, achieving 10^-10 Pa range with the NEG (non-evaporative getter) module. - High efficiency realized with an integrated baking heater and moisture retention cover. - 40% size reduction (compared to our previous models). - The cover and magnets are coated with a smooth surface heat-resistant paint. *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Applications】 ■ Ultra-high vacuum and extreme high vacuum exhaust systems that are completely oil-free ■ Electron microscopes, surface analysis equipment ■ Particle accelerators, nuclear fusion experimental devices, space environment testing equipment ■ Vacuum holding pumps such as electron tubes *For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.