Adopting an original electric revolver! It is integrated with the frame without using off-the-shelf actuators.
We would like to introduce our "Dual-Sided Microscope Measurement Unit." It features an original electric revolver that allows for high-precision alignment of the optical axes of the upper and lower objective lenses. Additionally, it is equipped with an auto stage that incorporates high-precision θ rotation on a thin, flat XY stage capable of high-speed drive. 【Features】 ■ Measurement of patterns on both sides of the workpiece (Size: W500×D780×H700) ■ Adoption of an original electric revolver ■ High-precision alignment of the optical axes of the upper and lower objective lenses ■ Auto stage with high-precision θ rotation on a thin, flat XY stage capable of high-speed drive *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ An automatic positioning unit for optical inspection that is highly precise and compact ■ Integrated with the frame without using off-the-shelf actuators *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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We propose the high precision, miniaturization, and cost reduction of devices. [Notice] Due to the expansion of our business, we have moved our office to the address below. It is easily accessible from Shizuoka Station, and we also have a permanent clean booth. 1-1-23 Heiwa, Aoi-ku, Shizuoka City