Excellent thermal tolerance! Bake-out is possible up to 400°C or 450°C.
The "Ultra High Vacuum L-Type All-Metal Valve" is a fully metallic product that can be used down to 10^-8 Pa or lower. The valve body is made of austenitic stainless steel, and the shaft seal also uses a bellows made of austenitic stainless steel. It features an all-welded structure, and the areas exposed to vacuum are oil-free and clean. Additionally, the valve sealing structure employs a reliable Capturing seal design similar to ICF flanges. 【Features】 ■ For ultra high vacuum applications ■ Capturing seal structure ■ Excellent tolerance to heating ■ Easy gasket replacement ■ Parallel piping connection possible (excluding 951-7148 mini metal valve) ■ Easy maintenance *For more details, please refer to the PDF document or feel free to contact us.
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【Lineup】 ■951-7148 ■951-7150 ■951-7152 *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Canon Anelva has been honing its skills in the ultra-high vacuum field, which requires advanced technological capabilities, since its establishment in 1967 as a developer and manufacturer of vacuum thin film formation equipment and vacuum components. As a company expanding its business globally, we aim to contribute to the development of international society under the corporate philosophy of "coexistence" advocated by the Canon Group. Moving forward, we will continue to strive to create high value-added products based on solid technological capabilities and play a role in the advancement of electronics.