A platform that allows you to directly measure and research the elements you want! It can be tailored to meet customer needs!
The "Cluster Vacuum Deposition System" consists of an evaluation chamber equipped with an automatic sample transport system, a sample exchange chamber, a sample storage chamber, and a sputtering chamber, as well as analytical instruments for dielectric constant and magnetic measurements, and Hall measurement devices. Additionally, the central automatic sample transport chamber connects to each deposition chamber and the analysis chamber. It automatically transports samples in a vacuum, facilitating the entire process from sample fabrication to evaluation. Furthermore, all chambers can be connected in a high vacuum environment, allowing the system to operate without exposing the samples to the atmosphere from fabrication to evaluation. 【Features】 ■ Composed of an evaluation chamber equipped with analytical instruments ■ Central automatic sample transport chamber - Automates the process from sample fabrication to evaluation, advancing efficiently ■ All chambers - Can be connected in a high vacuum environment - Operates without exposing samples to the atmosphere from fabrication to evaluation *For more details, please refer to the PDF document or feel free to contact us.
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【Configuration of Cluster Vacuum Film Deposition and Evaluation Equipment】 ■ Automatic Sample Transport System ■ Magnetic Measurement Device ■ Physical Property Measurement Device ■ Sample Exchange Chamber/Stocker Chamber ■ Two Film Deposition Chambers (Sputtering/PLD) ■ Dielectric Constant Measurement Device *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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At Pascal Corporation, we handle a variety of experimental equipment useful for research and development, including vacuum devices such as PLD/laser MBE systems, surface analysis equipment like atomic scattering spectrometers, cryogenic refrigeration systems, and Agilent (Varian) vacuum pumps. With a global perspective in vacuum equipment and scientific instruments, we constantly look ahead of the times, anticipate new technologies and product needs, and continue to provide products that are beneficial to our users.