The passline is 400mm! It will be cleaned with SPM and neutral detergent + US, and dried with warm water extraction.
We would like to introduce our "Mask Glass Cleaning Device." The mask glass is stored in an original cassette and cleaned using SPM and neutral detergent + US, followed by drying with warm water. The process is carried out in the following order: LD → Underwater → SPM → Rinse → Rinse → Neutral Detergent + US → Rinse + US → Rinse → SC-1 → Rinse → Rinse + MUS → Rinse → Warm Water Lift → ULD. 【Main Specifications】 ■ Conveying Direction: Left → Right ■ Passline: 400mm (LD, ULD) ■ Substrate Mask: min 9”×9” to max 24”×24” ■ Main Body Dimensions (Material) ・PVC Wrapped (Ivory): 8000W×2350D×2600H (2900H) ・Frame: Made of SUS304 *For more details, please refer to the PDF document or feel free to contact us.
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【Control】 ■recipe: 30 recipes ■TP: TFT collar ■PLC: Mitsubishi *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Dan Science Co., Ltd. focuses on cleaning technology, purification technology, and measurement technology, particularly centered around clean technology. We look to the future from a wide range of perspectives and continue to create new products that leverage our development spirit since our founding. We carry out a consistent process from manufacturing to inspection of ultra-cleaning devices, air purification devices, and vacuum devices in a clean environment. Please feel free to contact us if you have any inquiries.