A basic series of piezo stages that includes everything from single-axis to three-axis integrated types, with a wide range of strokes.
■Performance Classification by Two Mechanisms They are classified into "Direct Drive Mechanism," which emphasizes high-speed response with a high resonance frequency, and "Displacement Amplification Mechanism," which ensures stroke. Direct Drive Mechanism - This mechanism moves the stage directly using piezoelectric elements. - By limiting the stroke, it excels in resolution and response. - It has high rigidity, allowing stable positioning even under heavy loads. Displacement Amplification Mechanism - This mechanism mechanically amplifies the extension of the piezoelectric elements. - Depending on the amplification ratio, it can achieve strokes several times to over a dozen times that of direct drive. - Position reproducibility is maintained through feedback control using built-in displacement sensors. *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Product Application Examples】 - Semiconductor and FPD inspection equipment - HDD testers - Laser optical system alignment - Interferometric devices - Analyzing instruments - Nanometer positioning *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
Line up（4）
| Model number | overview |
|---|---|
| PS1H / PS1L Direct Drive X-axis Stage | |
| PS2H / PS2L Standard Direct Drive XY-axis Stage | |
| PSVH / PSVL Standard Direct Drive Z-axis Stage | |
| PS3H / PS3L Standard Direct Drive XYZ-axis Stage |
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Company information
Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.