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  6. [Piezostage] PT tilt and rotation type stage for optical mirrors

[Piezostage] PT tilt and rotation type stage for optical mirrors

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Piezo stage PT tilt and rotation type

last updated:May 24, 2023

THKプレシジョン
THKプレシジョン
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It is a shape particularly suitable for "tilt adjustment" of optical mirrors. There is one-axis tilt (θx) and two-axis tilt (θx, θy).

The piezo stage type for PT optical mirrors allows for precise adjustments of minute tilts, rotations, and skew angles. It is ideal for laser beam scanning, mirror alignment, and surface matching. Using piezoelectric elements, it can perform angular displacements such as rotation and tilt at high speed and with precision. This type features a flexible hinge structure that enables rapid small-angle displacements. In addition to rotation and tilt, simultaneous control of multiple axes allows for linear motion as well. The high responsiveness of the piezoelectric elements, combined with feedback control from built-in sensor signals, enables high-speed and high-precision alignment of small angles. The simple structure of the components allows for a compact main body size, making it easy to integrate into devices. We offer a variety of angle adjustment options, including simple tilt types, rotation types, goniometric types with a virtual rotation center, and planar skew types with three-point support. *For more details, please download the materials or feel free to contact us.*

    Other machine elements
nano_milar.JPG

[Piezostage] PT tilt and rotation type stage for optical mirrors

nano_milar.JPG
nano_milar.JPG
  • Related Link - https://www.thkprecision.co.jp/product/piezo/45

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basic information

【Features】 ○ Various angle adjustments possible ○ High-speed, high-precision scanning operation ○ Compact and easy to integrate into devices 【Specifications】 ○ PT1M36-500S → Stroke: 500nm → Resolution: 0.01nm → Repeatability: ±0.01nm → Resonant frequency: 6900Hz → Body size: 42×36×29mm ○ PT2M40-400S → Stroke: 400/400nm → Resolution: 0.01/0.01nm → Repeatability: ±0.01/±0.01nm → Resonant frequency: 500Hz → Body size: 45×40×40mm *For more details, please download the materials or feel free to contact us.

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Applications/Examples of results

[Examples of Use] Laser beam axis adjustment Precision parallel surface alignment Micro-angle adjustment of optical devices Tilt adjustment Cavity length adjustment

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Piezo Stage PT Tilt/Rotation Type Catalog

Piezo Stage PT Tilt/Rotation Type Catalog

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THKプレシジョン

THKプレシジョン

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Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.

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