Suitable for fine observation and high-precision mapping measurements combined with laser transmission and microscopy/analysis equipment.
■From Compact to Large Aperture We offer a range from compact apertures suitable for small devices to large aperture types that can align large panel substrates. ■Smooth and Accurate Scanning High-precision feedback control enables reliable operation in accordance with command signals. *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Product Application Examples】 - Scanning Probe Microscope - Microscope Sample Stage - Spectroscopic Analysis Equipment - Semiconductor and FPD Related Equipment - Exposure Equipment - Mapping Measurement *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
Line up（4）
| Model number | overview |
|---|---|
| PK1L Open-Top X-Axis Stage | |
| PK2H / PK2L Open-Top XY-Axis Stage | |
| PKVH / PKVL Open-Top Z-Axis Stage | |
| PK3H / PK3L Open-Top XYZ-Axis Stage |
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Company information
Ultra-precise positioning on the nanometer order can only be achieved when the piezoelectric actuator, mechanical mechanism, and control, which serve as the driving source, are matched within the system. Our company will modularize these fundamental elements and provide them as user-friendly products.