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  6. ASMPT's ultra-high precision flip chip bonder 'NANO Pro'

ASMPT's ultra-high precision flip chip bonder 'NANO Pro'

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NANO Pro

last updated:Sep 05, 2023

兼松PWS
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Achieved alignment accuracy of ±0.2μm. Extensive track record of implementation, primarily in optical communication and silicon photonics.

The "NANO Pro" is a bonding device that uses ASMPT's patented alignment technology to bond diced chips to wafers, substrates, and chips with ultra-high precision of ±0.2μm. It employs laser bonding, achieving localized heating and a high-speed temperature profile during the bonding process. It also features mechanisms to suppress vibrations during bonding and from external sources. 【Main Specifications】 ■ Alignment Accuracy: ±0.2μm@3σ ■ Cycle Time: 18 seconds (varies by material) ■ Die Size: 0.1mm to 25mm ■ Substrate Size: MAX 300×300mm ■ Bonding Force (Load): 3g up to 2000g ■ Bonding Methods: Eutectic solder, epoxy, UV-curable resin, laser bonding 【Adoption Results】 ■ Optical communication ■ Silicon photonics ■ R&D and mass production facilities ■ MEMS sensors, LiDAR, VCSELs, etc. *For more details, please feel free to contact us.

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ASMPT's ultra-high precision flip chip bonder 'NANO Pro'

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ASMPT's flip chip/die bonder offers alignment accuracy ranging from 0.2μm to 25μm, with cycle times from 18 seconds to 0.16 seconds. We can recommend die bonders based on the size of the die and substrate, as well as the bonding method. In addition to die bonders, we have a wide range of backend equipment, including laser dicing machines, wire bonding machines, AOI equipment, molding machines, and sintering machines. *Please feel free to contact us if you are looking for die bonders or backend equipment.*

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Applications/Examples of results

MicroLED, Opto, Silicon Photonics, AOC, VCSEL, Laser Diode, WLP, 2.5D/3D IC, TSV, TCB, Fan-out/EWLP, MTP etc.

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ASM AMICRA Flip Chip/Die Bonder NANO Pro

ASM AMICRA Flip Chip/Die Bonder NANO Pro

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兼松PWS

兼松PWS

Industrial Machinery

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Our company started in 1982 as a technical trading company specializing in the sales and maintenance services of semiconductor manufacturing equipment imported from overseas, as a group company of Kanematsu Corporation. Recently, in order to meet the diverse needs of our customers, we have been committed to ensuring that not only manufacturing equipment but also overseas products such as parts, materials, and subsystems can be used with confidence by our customers. While being a trading company, we have enhanced our technical department, which is responsible for planning, development, design, and manufacturing, to propose comprehensive technical solutions and expand our business globally to customers both domestically and internationally. In the future, we aim to continue being a company that provides new added value and services as an electronics technology trading company, growing together with our customers.

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