Easy to attach to your microscope, system upgrade! Various edge detection specifications are possible.
The "LW-3200/MT-3200" is a system that can measure the linewidth of semiconductor wafers and liquid crystal color resist with a repeatability precision of 3σ = 10nm. Depending on the type of line, such as negative, positive, inside, or outside, various edge detection specifications can be set. Inclined lines can also be measured perpendicularly to the detected line. Additionally, it can be combined with easy operation and high-precision autofocus as an option. *Please note that there may be a certain period required for delivery. 【Features】 ■ Measurement with a repeatability precision of 3σ = 10nm ■ Various edge detection specifications available according to the type of line ■ Inclined lines can be measured perpendicularly to the detected line ■ Can be combined with easy operation and high-precision autofocus (optional) *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Image Processing Unit Specifications (Partial)】 ■ Digital Image Measurement Device - Measurement Contents: Line width, circle diameter (arc, area, angle, edge, spacing) ■ Measurement Reproducibility: 3σ = 0.01μm (repeated measurements at 100x magnification with AF operation) ■ Minimum Display: 0.001μm ■ Line Width Edge Detection: Options available for negative, positive, inner-inner, outer-outer, inner-outer, bottom-bottom, etc. ■ Calibration Values: Up to 20 types can be registered according to lens magnification ■ Data Output: Measurement results can be saved as CSV data and measurement result images (BMP/JPG) *For more details, please refer to the PDF document or feel free to contact us.
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【Application】 ■Micro line width measurement *For more details, please refer to the PDF document or feel free to contact us.
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