Ideal for universities, research, and development! High-intensity excimer irradiation unit capable of bulk irradiation.
The "SPC Series" is a flat-type excimer UV irradiation device. It improves the illuminance distribution from the conventional ±15% to ±5%. It is an excimer irradiation unit capable of high illuminance bulk irradiation. It can be utilized for wafer cleaning, exposure light sources, coater pretreatment, resist modification, and more. 【Features】 ■ Illuminance monitor function ■ Feedback control ■ Vacuum compatibility ■ Improved illuminance distribution from the conventional ±15% to ±5% *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
【Specifications (Partial)】 ＜QEF-300SPC＞ ■Wavelength: 172nm ■Utilities: N2 / Cooling Water / AC240V ■Distribution: ±5% ■Irradiation Aperture: φ332mm ■Compatible Work Size: 12inch ■Illuminance (Maximum at Window Surface): 80mW/cm2 *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Application Examples】 ■ Wafer Cleaning ■ Mask Cleaning ■ Exposure Light Source ■ Coater Pretreatment ■ Ashing ■ Resist Modification *For more details, please refer to the PDF materials or feel free to contact us.
catalog（1）
Download All Catalogs
Company information
Quark Technology Co., Ltd. manufactures and sells various industrial equipment using cutting-edge optical application technology. Through the development of vacuum ultraviolet and UV-LED light sources, we have introduced manufacturing technologies for semiconductors, new displays such as LCDs, PDPs, films, and EL, as well as various electronic materials and devices. Additionally, we are planning research and development to address the demand for waste and environmental management equipment, which are pressing medical and social issues. All matter is composed of atoms, nucleons, and "quarks." At Quark Technology, we continue to research light and challenge ourselves in industrial application technologies.