[Case Study] Proposal for a prism that maintains high reflectivity even when dirt adheres.

Achieve nanometer-level precision in optical components! Realize high reflectivity unaffected by surface conditions!

We received a request from a semiconductor manufacturer to analyze samples of prisms used in integrated circuit manufacturing equipment sensors. Upon conducting an analysis with our own application of grease (contamination), we discovered that the contamination disrupted the total reflection conditions, resulting in a loss of light intensity. In the event that contamination occurs, it could lead to a decrease in detection accuracy and potentially cause process defects, making prompt improvements essential. Therefore, we proposed a prism equipped with a high-reflective mirror that maintains high reflectivity even if contamination occurs, referred to as the "Prism with Induced Multi-Layer Film Mirror." We received high praise from the semiconductor manufacturer, and it was adopted immediately. [Case Overview] ■ Issue: Contamination on the reflective surface affects and reduces reflectivity ■ Solution: Maintains high reflectivity even with contamination, contributing to the quality assurance of precise semiconductor manufacturing ■ Featured Product: Prism *For more details, please refer to the PDF document or feel free to contact us.

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