Service & Support

We explain the operating principle of the GP200 series metal seal type pressure-based mass flow meter (P-MFC) in a video. (English) https://www.youtube.com/watch?v=ZWB03A_9fo8 Video Chapters 00:00 - What is Brooks Instrument? 01:00 - What is a conventional pressure-based MFC? 02:10 - Introduction to the GP200 pressure-based MFC 03:30 - Advantages of the GP200 MFC 03:50 - Pressure measurement method of the GP200 MFC 04:45 - Superiority of the GP200 This pressure-based mass flow meter adopts a unique design that overcomes the limitations of conventional pressure-based MFCs and significantly improves process performance.

The operating principles of the SLA series are explained in the video. (English) https://www.youtube.com/watch?v=XKpX3rrt1qc Video Chapters 00:00 What is Brooks Instrument? 00:10 How to connect power to the thermal mass flow meter 00:24 Basic structure of the thermal mass flow meter 00:35 Diverting a portion of the gas flow with a laminar flow element 00:56 Measuring temperature difference with thermal sensors 01:08 Excellent sensor stability 01:37 How to measure process gas flow 02:17 Circuit board of the thermal mass flow meter 02:34 What are advanced alarm and diagnostic functions? <Main advantages of Coriolis flow meters> ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration, reducing total ownership costs ■ Brooks Instrument's unique thermal sensor technology improves the S/N ratio and enhances flow accuracy at low set points.

The SLA5800 series thermal mass flow controllers/meters are widely adopted as standard equipment due to their excellent accuracy, stability, and reliability. This series features a wide range of flow measurement capabilities and is suitable for various temperature and pressure conditions, making it ideal for a broad range of applications including research in the chemical and petrochemical fields, analytical instruments, fuel cells, and life sciences. Contents ■Features and Benefits ■Standard Specifications ■Product Dimensions ■Model Codes ■Approvals, Certifications, and Services ■Service and Support, etc.

Model GF40 "One device supports various gases and flow rates" The ability to accommodate multiple gases with a single device maximizes process flexibility and productivity. The GF40 series elastomer-sealed mass flow controllers/meters, equipped with Brooks Instrument's proprietary MultiFlo technology, are ideal for systems, processes, and facilities that use diverse gases, frequently change gas types, or need to recalibrate ranges while maintaining measurement and control accuracy. With unprecedented flow measurement and control performance, it elevates process flexibility to a new dimension. Applications ■ Solar cell CVD (Chemical Vapor Deposition) systems ■ Life science bioreactors ■ Vacuum processes ■ Nanotechnology/MEMS manufacturing ■ Plasma, glass, web coating systems ■ Options for manifold/gas supply systems