Coriolis mass flow meter for semiconductors

Accurately measure high pressure, low flow, and various characteristics of gas!

In the semiconductor manufacturing industry, precise gas flow control during the manufacturing process is essential for the stable production of high-quality products. In particular, processes such as film deposition, etching, and CVD are directly affected by gas flow rates, which impact product quality and yield. Inadequate gas control can lead to wafer defects and equipment downtime. ALICAT Coriolis mass flow meters/controllers accurately measure high-pressure, low-flow gases with various characteristics, addressing the challenges of gas control in semiconductor manufacturing processes. 【Application Scenarios】 - Gas flow control in the film deposition process - Gas flow control in the etching process - Gas flow control in the CVD process - Gas flow control in the sputtering process 【Benefits of Implementation】 - Stable supply of high-quality semiconductor products - Improved yield - Reduced manufacturing costs - Process optimization

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