Accurately measure high pressure, low flow, and various characteristics of gas!
In the semiconductor manufacturing industry, precise gas flow control during the manufacturing process is essential for the stable production of high-quality products. In particular, processes such as film deposition, etching, and CVD are directly affected by gas flow rates, which impact product quality and yield. Inadequate gas control can lead to wafer defects and equipment downtime. ALICAT Coriolis mass flow meters/controllers accurately measure high-pressure, low-flow gases with various characteristics, addressing the challenges of gas control in semiconductor manufacturing processes. 【Application Scenarios】 - Gas flow control in the film deposition process - Gas flow control in the etching process - Gas flow control in the CVD process - Gas flow control in the sputtering process 【Benefits of Implementation】 - Stable supply of high-quality semiconductor products - Improved yield - Reduced manufacturing costs - Process optimization
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【Features】 - Compatible with high pressure, low flow, and various gas characteristics - Ideal for measurement and control of components with ultra-low flow functionality - Compatible with corrosive gases - Supports 98 different types of gases - Humidity correction possible with the addition of a relative humidity sensor option 【Our Strengths】 As an authorized distributor of ALICAT, we sell mass flow meters, mass flow controllers, and more. We provide reliable technical support tailored to usage conditions and purposes.
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■ High-performance mass flow meter/controller M/MC series ■ Low-pressure loss mass flow meter/controller MW/MCW series ■ Corrosive gas and refrigerant gas compatible mass flow meter/controller MS/MCS series ■ Intrinsically safe explosion-proof mass flow meter/controller IS-Max series ■ Liquid flow meter/controller L/LC/LCR series ■ Vacuum shut-off valve equipped MCV/MCVS series ■ SEMI standard compliant valve built-in type MCE/MCES series ■ Dual valve MCD/MCRD series ■ Pressure gauge/pressure controller P/PC/PC3/PCD/PCR series ■ Intrinsically safe explosion-proof pressure gauge/pressure controller IS-Pro series ■ Thermal mass flow meter compact mass flow controller BASIS series ■ High-precision flow control for bioreactors BIO series ■ Coriolis high-pressure low-flow high-precision flow controller CODA series
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