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  6. Ultra-high vacuum and oxidation atmosphere compatible substrate heating heater

Ultra-high vacuum and oxidation atmosphere compatible substrate heating heater

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last updated:Oct 06, 2022

ケニックス
ケニックス
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Large-scale heaters, support for custom shapes, installation of surface treatment mechanisms, and connection to vacuum devices are all possible!

This product is a clean heater with high control responsiveness and an extremely low gas emission structure. It is compatible with both direct sample irradiation heating and hot plate indirect heating. It has a small heat capacity and can be used in ultra-high vacuum, atmospheric pressure, and oxygen atmosphere. 【Features】 ■ Halogen lamp capable of uniform irradiation ■ Economical and highly energy-efficient heater with high responsiveness ■ Composed of quartz body lamp and high-temperature compatible metal reflector and base ■ Structure with extremely low gas emission ■ Capable of heating up to a maximum temperature of 900°C (temperature control measurement point, in vacuum) ■ Very high control responsiveness *For more details, please refer to the PDF document or feel free to contact us.

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2022-10-04_15h48_07.png

Ultra-high vacuum and oxidation atmosphere compatible substrate heating heater

2022-10-04_15h48_07.png
2022-10-04_15h48_07.png
  • Related Link - http://www.kenix.jp/product/choukousoku.html

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【Specification Example (Partial)】 ■Circuit Board Heating Heater - Light Source: Halogen Lamp (5 units) - Power: 600W x 5 units - Irradiation Area: φ100 - Heating Atmosphere: Vacuum and Oxidizing Atmosphere - Lamp Control: PID Control *For more details, please refer to the PDF document or feel free to contact us.

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Kenix Corporation Comprehensive Catalog

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ケニックス

ケニックス

Electronic Components and Semiconductors

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