Ultra-high-performance endpoint detection system for optical endpoint detection that addresses the ion milling process, which was difficult to detect.
You can monitor the light emission from the etching process in real-time. Equipped with a CCD sensor, it supports a wavelength range of 200-800 nm, has high sensitivity in the UV range, and is equipped with a spectrometer that can capture even subtle changes that were difficult to detect. Additionally, it supports the ion milling process with a vacuum feed-through option. The optical endpoint monitor from Verity is designed to install a measurement receiving part via a flexible tube near the sample in a vacuum. By measuring the material emission during the etching/milling process, it obtains temporal changes in film thickness and film type. 【Features】 ◼ Powerful endpoint determination capability ◼ Uses dedicated high-function SpectraViewTM software ◼ Capable of endpoint detection, fault detection, and process diagnostics ◼ Wavelength range of 200 – 800 or 900 nm ◼ Further wideband wavelength measurement options available ◼ Compliant with RoHS directives
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basic information
- Basic Information The control supports USB/Ethernet as a data transfer interface, allowing for the acquisition of spectral data over a network. Additionally, the included SpectraView software enables monitoring and analysis of the collected spectral data, with excellent algorithms such as the unique endpoint trace generation by Verity that supports fine processes. Price: Please inquire Delivery time: Please inquire Model number/Brand name: SD1024GH (Verity Instruments) Applications/Examples of Use Plasma Etching MEMS Etching Ion Milling Reactive Sputtering Control
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Applications/Examples of results
Applications / Examples of Achievements Plasma Etching MEMs Etching Ion Milling Reactive Sputter Control
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Company information
Our company started in 1988 as an overseas export trading company for vacuum thin film manufacturing equipment, and has expanded its operations as a "total planner of vacuum technology" up to the present day. During this time, we have focused on the development of optical thin film materials, as well as the sales of ion beam processes and refrigeration units (Sapcold). Additionally, we have developed and are set to launch the GCIB (Gas Cluster Ion Beam) process equipment, which is expected to be an important technology in the next generation of nano-processing. Starting with glasses and camera lenses, we now see new media continuously emerging in the optical-related industry, including digital cameras, mobile phones, and medical lenses.