N2, Air, H2, He, Ar, O2, CO2, etc. are the targets! Metal seal mass flow meter with an accuracy of ±1% F.S.
We would like to introduce our metal seal mass flow meter, the 'MODEL 5410 SERIES.' It is designed for gases such as N2, Air, H2, He, Ar, O2, CO2, etc. The maximum flow rate ranges from 10 SCCM to 20 SLM, with an accuracy of ±1% F.S. Please feel free to consult us when you need assistance. 【Standard Specifications (Excerpt)】 ■ Sensor Type: Thermal Wire Sensor ■ Maximum Inlet Pressure: 500 kPa (G) ■ Allowable Ambient Temperature: 0 to 50℃ ■ Contact Gas Material: SUS316L, Ni, PTFE ■ Electrical Connection: D-sub 9-pin KFC standard (compliant with SEMI standard) ■ Weight: Approximately 800g *For more details, please refer to the PDF document or feel free to contact us.
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The environment surrounding the Earth consists of gases and liquids. The technology to measure, control, and generate these is essential for the development of society and industry, and can be considered a foundation that supports the next generation of manufacturing. For over 70 years, Kofloc has been exploring measurement and control technology primarily for small fluid volumes under the motto "Science of Fluids." We have built trust across diverse fields and now boast a top domestic market share in various sectors. Kofloc continues to challenge itself with new technologies that create a future for people and the Earth, striving to realize a rich life for everyone.