Introducing AlN components with excellent corrosion resistance to fluorine-based gases, suitable for dummy wafers and targets!
At Furukawa Electric, we handle "AlN components for semiconductor manufacturing equipment." Aluminum nitride (AlN) is a well-balanced material with excellent thermal conductivity, thermal radiation (heat dissipation), thermal shock resistance, and electrical insulation properties, along with a thermal expansion that matches that of Si wafers. In addition to its excellent resistance to corrosion from fluorine-based gases, it has a low thermal expansion that matches Si, preventing deformation of the wafer due to temperature changes and reducing particle generation caused by the peeling of deposited films. 【Features】 ■ High thermal conductivity and thermal radiation rate, with excellent heat uniformity ■ Strong against thermal shock, capable of withstanding rapid heating and cooling ■ Low thermal expansion that matches Si, preventing wafer deformation due to temperature changes ■ Reduces particle generation caused by the peeling of deposited films *For more details, please refer to the PDF materials or feel free to contact us.
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【Specifications】 ■External dimensions: (maximum) Φ/□550mm ■Plate thickness: 0.25 to 30mm *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ For semiconductor manufacturing equipment (CVD, etching, etc.) - Various susceptors, electrostatic chucks, heater uniform plates - Vacuum chucks, heaters ■ Dummy wafers ■ Targets ■ Components for compound semiconductor manufacturing equipment *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Furukawa Machinery and Metal Co., Ltd. established Furukawa Electronics Co., Ltd. as a wholly-owned subsidiary on March 1, 2005, through a company split. As a result, Furukawa Electronics Co., Ltd. has inherited the existing electronic materials business from Furukawa Machinery and Metal Co., Ltd. We intend to take this opportunity to improve management efficiency and to provide products, technologies, and services that satisfy our customers. All of our executives and employees are united in their commitment to devote their utmost efforts to our business. We kindly ask for your continued support and guidance, as well as your patronage, which we hope will be even greater than before.