The goat mite processing of semiconductor manufacturing equipment demonstrates powerful suppression of particle generation.
Anodized film thickness of 1μm! Excellent corrosion resistance and sealing performance with no mass loss! Plasma resistance is improved by 1.3 times compared to anodized coatings!
"Yagimaito processing" is our patented technology that ensures ultra-corrosion resistance by forming a new layer approximately 1μm thick on the surface of the anodized coating. It exhibits excellent alkali resistance, with corrosion resistance about five times greater than conventional products. Additionally, the etching depth has decreased by 10.6% at an acceleration voltage of 1.5KV, 12.0% at 2.0KV, and 21.2% at 2.5KV compared to conventional products. This indicates that Yagimaito has superior plasma resistance compared to traditional products. Furthermore, in anodizing processes for semiconductor manufacturing equipment, Yagimaito is used in chambers of etching devices that utilize chlorine-based gases. Yagimaito enhances durability, leading to cost reductions, reduced internal corrosion, and effective suppression of particle generation.
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basic information
【Features】 ■ A hydrated oxide layer is formed inside the fine pores and in the upper layer of 1μm thickness. ■ Excellent alkali resistance, with corrosion resistance approximately five times greater than conventional materials. ■ Superior sealing performance, with no mass loss. ■ Plasma resistance improved by 1.3 times compared to conventional anodized coatings. ■ Enhanced durability. ■ Cost reduction. ■ Reduced internal corrosion. ■ Suppression of generated particles.
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【Usage】 ■ Semiconductor manufacturing equipment *For more details, please refer to the PDF document or feel free to contact us.
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Company information
China Electric Chemical Industry Co., Ltd. is a global company based in Yamaguchi that challenges future technologies. We perform metal surface treatments, including anodizing. With our unique technology, we specialize in surface treatment of aluminum used in semiconductor manufacturing equipment. We are always conscious of carbon neutrality, strive to prevent pollution, and work hard to protect and preserve the global environment.