Stable measurement and control even with low light intensity plasma! Constructing PEM with thermally stable photomultiplier tubes.
"VA PROCOS 2" is a modular process control system specially designed to stabilize reactive sputtering processes in sensitive transition modes. It is suitable for process adjustments using combinations of optical emission spectra, cathode voltage, oxygen partial pressure, and/or other PLC signals. Additionally, it can be used to stabilize product characteristics by adjusting the stabilization of plasma discharge and the supply of one or more reactive gases. 【Features】 ■ Improved film deposition rate ■ Special processing for "arc" event detection and response ■ Selection of action points ■ Automatic online balance adjustment ■ Configuration of PEM with thermally stable photomultiplier tubes *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Other Features】 - Stabilization of processes, reduction of losses, and extension of campaign time - Uniformity of optimized thin films and composition ratios - Stable measurement and control even with low emission intensity plasma - Increased productivity - Minimization of energy consumption (achieving high film formation speed with less power) *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Application Examples】 ■Improvement of film formation rate ■New film properties ■Reduction of arcing/nodules *For more details, please refer to the PDF materials or feel free to contact us.
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Our company is located in Tokyo, where we support VON ARDENNE's sales activities and strategic business development. Additionally, our service engineers support the equipment of Japanese customers. We have installed building material glass coating systems, roll-to-roll web coaters, solar cell sputtering systems, and electron beam systems. Please feel free to contact us if you have any inquiries.