Reduction of adjustment time for new recipes! The tool contributes to improving the productivity of the film formation system.
The "VA Process Master" is a tool for automated process settings and controlling all thin film systems. This tool adopts a new approach to process control, delivering excellent results without operator involvement. Additionally, it enables complete automatic drift correction for the sputtering process, improving product quality. Furthermore, this tool allows our customers to create complex recipes for attractive products. 【Features】 ■ Inline measurement analysis - Average values and uniformity of thin film thickness ■ Closed-loop control - Process power output - Reactive gas supply - Magnet bar (shim settings) *For more details, please refer to the PDF document or feel free to contact us.
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**Merits (Excerpt)** ■ Objectively predict behavior instead of relying on subjective judgment ■ Permanent action ・ Maintain deviation at zero instead of waiting for threshold violations ・ Do not create a "sawtooth" trajectory at the start ■ Overall Overview ・ Simultaneous control of all magnetrons ・ Simultaneous average value (output) and balance control *For more details, please refer to the PDF document or feel free to contact us.*
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【Purpose】 ■ Automated process settings and control of all thin film systems *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company is located in Tokyo, where we support VON ARDENNE's sales activities and strategic business development. Additionally, our service engineers support the equipment of Japanese customers. We have installed building material glass coating systems, roll-to-roll web coaters, solar cell sputtering systems, and electron beam systems. Please feel free to contact us if you have any inquiries.