Linear Organic Material Deposition Device 'LOE'

Optimized thermal design for handling delicate organic materials! Suppressing thermal effects on evaporated substances and substrates.

The "LOE" is a component that evaporates organic materials using heat from a sealed crucible. The thermal design optimized for handling delicate organic materials minimizes thermal impact on the vapor and the substrate. The vapor is supplied through a heated pipe leading to the substrate and is released onto the substrate from a linear nozzle array. All parts that come into contact with the organic vapor, especially the crucible and nozzle pipe, are made of a completely inert ceramic with respect to organic EL materials. The crucible and nozzle pipe are heated to temperatures exceeding the condensation point of the organic materials. 【Features】 ■ Deposition of small molecular weight organic materials ■ Deposition of solid or liquid precursors ■ Single deposition, co-deposition, triple deposition ■ Operates vertically or horizontally ■ Maximum substrate width of 1200mm *For more details, please refer to the PDF document or feel free to contact us.

Evaporation Equipment