In addition to physical vapor deposition (PVD) plasma sources, we offer various chemical vapor deposition (CVD) plasma sources!
The "Linear PECVD Plasma Source" is a product similar to standard capacitively coupled plasma electrodes. It operates in an inline dynamic mode, where substrates, carriers, or webs continuously pass through the electrodes and are coated continuously. Even in cases where mechanical and electrical large-scale operations are required to uniformly coat large substrates in a stationary mode using CCP CVD, the Linear PECVD reduces spatial parameters to a one-dimensional task. It can be skillfully handled even when coating at VHF frequencies is anticipated for achieving higher coating speeds. 【Features】 ■ Capacitively coupled dynamic PECVD for continuously moving substrates ■ Continuous supply sheets, carriers, or roll-to-roll processes ■ Integrated gas distribution system on the side ■ Built-in process gas exhaust system ■ Flexible operating positions: upward, downward, vertical *For more details, please refer to the PDF document or feel free to contact us.
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basic information
**Merits (Excerpt)** - Scalable high-throughput options for various CCP CVD processes - High-speed continuous film deposition on various types of substrates - Achieves excellent film thickness uniformity - Capable of large-area film deposition using RF or VHF - Achieves long campaign periods for various types of equipment configurations and materials *For more details, please refer to the PDF document or feel free to contact us.*
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Applications/Examples of results
【Applications】 ■Gas distribution system ■Gas exhaust system *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company is located in Tokyo, where we support VON ARDENNE's sales activities and strategic business development. Additionally, our service engineers support the equipment of Japanese customers. We have installed building material glass coating systems, roll-to-roll web coaters, solar cell sputtering systems, and electron beam systems. Please feel free to contact us if you have any inquiries.