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  6. Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera LOTTE-i

Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera LOTTE-i

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Greateyes「LOTTE-i」

last updated:Apr 13, 2023

ケイエルブイ
ケイエルブイ
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Ultra-high sensitivity CCD camera for VUV, EUV, and X-ray regions for use in vacuum chambers.

This is an ultra-high sensitivity CCD camera compatible with VUV, EUV, and X-ray regions that can be used in a vacuum chamber. Thanks to its high-sensitivity CCD and cooling technology, it achieves ultra-low noise and a high signal-to-noise ratio, enabling the detection of weak signals that cannot be measured with CMOS cameras. It features a stainless steel housing that minimizes outgassing to the extreme, allowing it to be used in UHV (Ultra High Vacuum) environments. The CCD cameras from greateyes possess the overwhelming characteristic of ultra-high sensitivity in the VUV, EUV, and X-ray regions while also exhibiting high performance as a camera, making them ideal for use in vacuum systems.

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lotte-rc-version.jpg

Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera LOTTE-i

lotte-rc-version.jpg
lotte-rc-version.jpg lotte-sc-version.jpg
  • Related Link - https://www.klv.co.jp/product/euv-xray-camera/loot…
  • Special site - Product/service details - https://pr.mono.ipros.com/klv/product/

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■Product Model The ALEX series from greateyes offers four lineups based on resolution: 1k1k 2k2k 2k2k plus 4k4k Additionally, for each lineup, you can choose from the following CCD sensor types based on your application: - Front Illuminated CCD (FI) - Back Illuminated CCD (BI) - Fringe Suppression Consideration Deep Depression Type CCD (BI DD) - Back Illuminated CCD [High Sensitivity Type] (BI UV1)

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Applications/Examples of results

EUV lithography X-ray tomography Fourier transform holography Phase contrast X-ray imaging X-ray diffraction Tycho graphy Grazing incidence small-angle X-ray scattering (GISAXS)

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Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera_ALEX-i / LOTTE-i Product Catalog

Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera_ALEX-i / LOTTE-i Product Catalog

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SEMICON Japan 2024 Exhibition

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Event Date: December 11 (Wednesday) to December 13 (Friday), 2024 Venue: Tokyo Big Sight, East Exhibition Hall, Hall 7 Featured Products: - Mask aligners, peripheral exposure, high-output LED irradiation devices for steppers - Semiconductor surface inspection equipment - High-spectral camera capable of video recording - Compact spectrometer - LPP-EUV light source - Laser-excited white light source (190–2500nm) - Ultra-high sensitivity CCD camera for VUV and X-ray regions - Plasma source - SC light source (supercontinuum light source)

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ケイエルブイ

ケイエルブイ

Testing, Analysis and Measurement

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K.L.V. has been discovering cutting-edge optical components from around the world and supporting the development of various optical technologies, particularly in the fields of medicine, environment, and analysis. With the theme of "SOLUTION FOR OPTICAL SYSTEM DEMANDS," we are actively building and expanding our optical solution business. We aim to respond to our customers' increasingly sophisticated and diverse needs more quickly and accurately than anyone else, becoming a company that contributes to both business and society. As a "specialized trading company proposing the utilization of optical energy," we invite you to look forward to our unique and promising optical solutions that will pave the way for a new era of light.

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