Efficiently irradiate with vacuum ultraviolet light to oxidize and decompose organic matter in water! Reduce TOC in the ppb order.
The water used in the semiconductor industry is becoming increasingly purified, and the requirements for the concentration of organic substances (TOC) in ultra-pure water are becoming stricter. The "FOV Series" efficiently irradiates vacuum ultraviolet light (185nm) generated from high-output low-pressure mercury lamps, oxidizing and decomposing organic substances in water. It is suitable for reducing TOC levels in the ppb range. Additionally, its vertical design allows it to be used in spaces with limited installation area. 【Specifications (partial)】 ■ Input voltage: Selectable from AC100V-AC200V (50/60Hz) ■ Alarm output: Standard equipped with a lamp failure voltage-free contact ■ Control panel material: SS ■ Control panel paint color: Munsell 2.5Y 9/1 ■ Cylinder material: SUS316 *For more details, please refer to the PDF document or feel free to contact us.
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【Other Specifications (Partial)】 ■Cylinder inner surface finish: #400 buff polishing, electropolishing ■Cylinder outer surface finish: electropolishing ■Maximum operating pressure: 1.0MPa *For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■Semiconductor Industry *For more details, please refer to the PDF document or feel free to contact us.
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Our company recognized the usefulness of ultraviolet sterilization devices early on in Japan and has been dedicated to developing products that meet customer needs for many years since we developed a water ultraviolet sterilization device as a new sterilization method in fields where conventional heating or chemical treatment was not possible. Please feel free to contact us if you have any requests.