Wafer mapping device with robot transport, multifunctional 200x200mm, RD8 series wafer PL
The RD8 series wafer mapping device is designed to accommodate various wafer sizes and shapes with a maximum measurement area of 200×200mm. Basic measurements include photoluminescence, epitaxial film thickness, wafer warpage, transmittance and reflectance, backside illumination phosphor analysis, and wafer thickness measurement, and we also offer customized solutions to meet customer needs.
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basic information
【Specifications】 ○ Basic model: YWAFER-RD8-WL26, YWAFER-RD8-WL48 ○ Optical range and sensitivity model list: 200nm - 2200nm ○ Compatible wafer sizes for measurement: 2, 3, 4, 6, 8 inches and others (up to 200x200mm) ○ Mapping interval: 0.01mm～(0.02mm repeatability) ○ Robot transport: 25 wafer cassettes x 2 ○ Compatible wafer sizes for transport: 2 to 6 inches or 4 to 8 inches ● For other functions and details, please contact us.
Price information
Please feel free to contact us.
Delivery Time
※3 to 4 months
Applications/Examples of results
For other functions and details, please contact us.
Company information
Y Systems Co., Ltd. is a company engaged in the development, manufacturing, and sales of evaluation and measurement equipment for nitride-based wafers (substrates), which are the main materials for LEDs. Currently, we have 13 employees, but our brand is internationally recognized and we are gradually expanding our scale. Since our establishment as a venture company in Tokushima, where research and development related to optical semiconductors, including LEDs, is active, we have been in business for 20 years. We now sell equipment not only in Japan but also to manufacturers and research institutions in Taiwan, South Korea, China, and Europe, focusing on LEDs, laser diodes, and optical materials. Moving forward, we will continue to develop equipment related to optical semiconductors and promote the "Y Systems" brand globally from Japan.
![[TEM ED-Map] TEM Electron Diffraction Mapping Method](https://image.mono.ipros.com/public/product/image/371/2000823132/IPROS13976815575557580837.jpg?w=280&h=280)
![[Example of TOF-SIMS] Wide-area image map](https://image.mono.ipros.com/public/product/image/b40/2000719211/IPROS94475967595340691669.png?w=280&h=280)
