Glass-like Carbon “Carbon material with excellent chemical and corrosion resistance”
Glass-like Carbon is a type of carbon material with a proven track record for use in semiconductor manufacturing system components. High purity is also possible.
In addition to the general properties of carbon materials such as chemical resistance, corrosion resistance, heat resistance, and electrical conductivity, glass-like carbon has the characteristics of gas and liquid impermeability, isotropy, acid resistance, and no dust generation. Because of these excellent characteristics, glass-like carbon is mainly used as a component in a semiconductor manufacturing system. 【Common Characteristics of Glass-like Carbon】 ・Chemical resistance, corrosion resistance, heat resistance, electrical conductivity, and dust-free ・Impermeability to gases and liquids ・High purity (high purity is possible by a special treatment in the manufacturing process) ・High heat resistance, high X-ray permeability 【Characteristics of Glass-like Carbon Beads】 ・Spherical carbon material with a smooth surface, which can be used as filler or porous material for ceramics, etc. ・Low thermal expansion and high thermal shock resistance. ・Dense isotropic structure without pores ・Central grain size 100μm, 200μm 【Characteristics of Porous Glass-like Carbon】 ・Porous glass-like carbon has the characteristics of glass-like carbon and also has air permeability and liquid permeability. ・A proven track record in vacuum chuck applications, etc. *For more details, please contact us or download the catalog.
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basic information
In addition to the general properties of carbon materials, such as chemical resistance, corrosion resistance, heat resistance, and electrical conductivity, glass-like carbon is impermeable to gases and liquids, isotropic, acid-resistant, and dust free. Special treatment in the manufacturing process makes it possible to achieve high purity. Because of these excellent features, it is mainly used as a component in semiconductor manufacturing equipment. We also line up glass-like carbon beads, a spherical carbon material with a smooth surface that can be used as a porous material for fillers and ceramics, and porous glass-like carbon, which combines the characteristics of glass-like carbon with air and liquid permeability and has been used in vacuum chuck applications. *For more details, please contact us or download our catalog for more information.
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Applications/Examples of results
【Main Applications】 ・Plasma etching, CVD system components ・Sputtering targets ・High-purity and chemical-resistance materials ・Analyzer components ・Components for X-ray equipment ・Porous material (Glass-like carbon beads) ・Filler (Glass-like carbon beads) ・Vacuum chuck materials (porous Glass-like carbon) ・Various filters (porous glass-like carbon) ・Gas diffusion materials (Porous glass-like carbon)
Company information
Founded in 1930 as a specialized trading company for imports and exports, we celebrated our 90th anniversary in 2020 and are fully committed to the further development of the M.WATANABE Group. Since the mid-1960s, we have started manufacturing and selling our own products such as quartz processed products, silicone rubber molded products, and cleaning equipment, under the policy of selling silicon (Si) related products to the semiconductor industry. As a manufacturing trading company, we have grown alongside the IT society by providing high-quality products and services. Moving forward, we aim to create a company where employees of the group companies, centered around M.WATANABE & CO.,LTD., work vibrantly every day, and the entire workplace becomes a learning organization. We are determined to continue striving in all our business endeavors with a strong will to respond to the true needs of society. We sincerely ask for your continued support and patronage.