3BM Retainer Ring (CMP, Semiconductor)
3BM PET retainer ring optimized for conductor CMP process
Sales of semiconductor CMP device polishing tools, 3BM(R) retainer rings have begun.
3BM(R) resin is a material optimized for CMP (Chemical Mechanical Planarization) retainer rings, based on PET resin. Compared to PPS retainer rings, it has approximately three times the pad wear resistance. This can significantly reduce replacement frequency and contribute to increased productivity. Additionally, in the manufacturing process, we have achieved an unprecedented level of "ultra-cleaning" to ensure it can be used in cutting-edge CMP processes.
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basic information
■Excellent wear resistance More than twice the wear resistance of PPS retainer rings ■Reduction of scratches Significantly fewer wear debris particles compared to PPS, resulting in reduced scratches ■Renewable and environmentally friendly Can be recycled based on PET (recycling rate from 0% to 88%) We sell 3BM(R) retainer rings and their materials. The materials are 8" (φ250*φ198*t20) and 12" (φ355*φ295*t20).
Price information
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Delivery Time
※The delivery time may vary depending on the quantity and options, so please feel free to contact us.
Applications/Examples of results
This is a retainer ring used in semiconductor CMP processes. It has been adopted by major semiconductor factories. An article about the 3BM CMP retainer ring was published in the April 6, 2023 issue of the Electronic Device Industry Newspaper. Here is the content of the article published in the Electronic Device Industry Newspaper: ↓ https://e-taise.co.jp/page/article.html
Detailed information
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Using recyclable PET resin, the recycling rate increases from 0% to 88% by switching from PPS resin to PET resin.
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Company information
Taisei Corporation provides innovative solutions to address the frustrations and inconveniences faced by researchers and developers through its product sales, engineering, and processing businesses. In the engineering sector, we cater to a wide range of needs from small-batch, diverse prototypes to mass production, offering products such as one of the world's smallest compact vacuum reflow ovens, cordless ionizer guns, 3BM retainer rings, bobbin racks for optical fibers, custom probes and needles, and joystick manipulators. We deliver design and manufacturing tailored to our customers' needs quickly and flexibly, creating products that solve the challenges faced by researchers and developers.