Measurement of HF, HCl, and NH3 is possible! A high-precision and highly reliable rack-mounted analyzer.
The "OA-ICOS(TM) GLA231 Series" is an industrial trace gas analyzer that meets customer requirements with high sensitivity, high accuracy, and short response times. It is easy to use, starts up in a few minutes, and does not require calibration on-site. Maintenance required for preventive care is also minimal. 【Features】 ■ Capable of measuring single or multiple components of HF, HCl, and NH3 ■ Accurate and precise H2O measurements can also be performed simultaneously ■ Standard: 0-5V and 4-20mA analog output, Option: Modbus(TM) TCP ■ High-performance and optimized data processing capabilities aimed at measuring sub-ppb concentrations ■ Touchscreen digital display showing gas concentration and the status of the analyzer *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Password protection function for analyzers and data security ■ Option to select customizable calibration and performance certificate packages ■ Zero air treatment function for measuring targets during the process under highly reliable and optimized conditions *For more details, please refer to the PDF materials or feel free to contact us.
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【Purpose】 ■ Monitoring of FOUP (Front Opening Unified Pod) and deposition chamber ■ Monitoring of airborne molecular contamination (AMC) for the health and safety of semiconductor FAB processes and operators *For more details, please refer to the PDF document or feel free to contact us.
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ABB is a global technology leader in electrification and automation, aiming to create a more sustainable and resource-efficient future. By combining engineering and digital expertise, we enhance industrial performance, improve efficiency, productivity, and sustainability, and support the achievement of outstanding results. We call this "Engineered to Outrun." With over 140 years of history and approximately 110,000 employees worldwide, ABB is listed on the Swiss Stock Exchange (ABBN) and Nasdaq Stockholm (ABB). ABB Japan: It is a corporate group consisting of three companies: ABB Ltd., ABB Japan B.V., and B&R Ltd.